| Title |
Development of a Plasma-Enhanced Chemical Vapor Deposition System for High-Performance SRF Cavities |
| Authors |
- G. Gaitan, A.T. Holic, W.I. Howes, G. Kulina, P. Quigley, J. Sears, Z. Sun
Cornell University (CLASSE), Cornell Laboratory for Accelerator-Based Sciences and Education, Ithaca, New York, USA
- M. Liepe
Cornell University, Ithaca, New York, USA
- B.W. Wendland
University of Minnesota, Minnesota, USA
|
| Abstract |
Next-generation, thin-film surfaces employing Nb₃Sn, NbN, NbTiN, or other compound superconductors are essential for reaching enhanced RF performance levels in SRF cavities. However, optimized, advanced deposition processes are required to enable high-quality films of such materials on large and complex-shaped cavities. For this purpose, Cornell University is developing a plasma-enhanced chemical vapor deposition (CVD) system that facilitates coating on complicated geometries with a high deposition rate. This system is based on a high-temperature tube furnace with a high-vacuum, gas, and precursor delivery system, and uses plasma to significantly reduce the required processing temperature and promote precursor decomposition. Here we present an update on the development of this system, including final system design, safety considerations, assembly, and commissioning.
|
| Funding |
This work was supported by the U.S. National Science Foundation under Award PHY-1549132, the Center for Bright Beams |
| Paper |
download MOPMB015.PDF [3.715 MB / 4 pages] |
| Poster |
download MOPMB015_POSTER.PDF [1.951 MB] |
| Cite |
download ※ BibTeX
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※ EndNote |
| Conference |
SRF2023 |
| Series |
International Conference on RF Superconductivity (21st) |
| Location |
Grand Rapids, MI, USA |
| Date |
25-30 June 2023 |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editorial Board |
Kenji Saito (FRIB, MSU, East Lansing, MI, USA); Ting Xu (FRIB, MSU, East Lansing, MI, USA); Naruhiko Sakamoto (RIKEN, Wako, Japan); Volker R.W. Schaa (GSI, Darmstadt, Germany); Paul W. Thomas (FRIB, MSU, East Lansing, MI, USA) |
| Online ISBN |
978-3-95450-234-9 |
| Online ISSN |
2673-5504 |
| Received |
16 June 2023 |
| Revised |
29 June 2023 |
| Accepted |
01 July 2023 |
| Issue Date |
16 July 2023 |
| DOI |
doi:10.18429/JACoW-SRF2023-MOPMB015 |
| Pages |
100-103 |
| Copyright |
 Published by JACoW Publishing under the terms of the Creative Commons Attribution 4.0 International license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |
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